Multiple thickness gate dielectric layers

ABSTRACT

Dual gate dielectric constructions and methods therefor are disclosed for different regions on an integrated circuit. In the illustrated embodiment, gate dielectrics in memory array regions of the chip are formed of silicon oxide, while the gate dielectric in the peripheral region comprises a harder material, specifically silicon nitride, and has a lesser overall equivalent oxide thickness. The illustrated peripheral gate dielectric has an oxide-nitride-oxide construction. The disclosed process includes forming silicon nitride over the entire chip followed by selectively etching off the silicon nitride from the memory array region, without requiring a separate mask as compared to conventional processes. After the selective etch, oxide is grown over the entire chip, growing differentially thicker in the memory array region.

REFERENCE TO RELATED APPLICATION

This application is a continuation of prior U.S. patent application Ser.No. 09/879,604, filed on Jun. 12, 2001, now U.S. Pat. No. 6,653,675,issued on Nov. 25, 2003, which is a divisional of prior U.S. patentapplication Ser. No. 09/252,314, filed Feb. 18, 1999, entitled METHOD OFFABRICATING A DUAL GATE DIELECTRIC, now U.S. Pat. No. 6,383,861 issuedon May 7, 2002.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates generally to gate dielectrics forintegrated circuit transistors. More particularly, the invention relatesto processes and structures for optimizing the thickness of gatedielectrics.

2. Description of the Related Technology

In the field of integrated circuit fabrication, current leakage throughthin dielectric layers presents a continuing challenge to deviceintegration. Leakage through gate dielectrics of field effecttransistors (FETs) is known as Fowler-Nordheim currents, while gateinduced diode leakage (GIDL) occurs at the edge of the gate electrode.As the gate dielectrics, which are typically formed of silicon oxide,become increasingly thinner due to continued scaling of integratedcircuits in pursuit of faster and more efficient circuit operation, GIDLoccurs even during transistor off states.

Certain integrated devices, such as transistors within memory arrays ofa dynamic random access memory (DRAM), are particularly sensitive toGIDL. Moreover, significant transistor GIDL can induce leakage atstorage nodes of a memory array. Accordingly, gate oxides in memoryarrays must be effective at resisting GIDL for proper operation.

Transistors leakage tends to occur at gate edges, where electric fieldsare concentrated. Accordingly, one partial solution to the problem ofGIDL, where conventional oxides are used for the gate dielectric, is toperform a re-oxidation process. The re-oxidation is performed afterforming gate electrodes, such that the gate oxide edges under the gateelectrode corners are thickened relative to the remainder of the gateoxide dielectric. However, metals used in word lines (part of which formthe gate electrodes) are susceptible to degradation during there-oxidation process. Recently popular word line materials, such astungsten, are particularly susceptible to oxidation.

Peripheral circuits of a DRAM chip generally include logic circuits,such as address decoders and read/write control circuits. These logiccircuits in the periphery of the memory chip, in contrast to memoryarray transistor, require faster transistor switching times. Suchaggressive operation is facilitated by thinner gate oxides in theseperipheral circuits. Logic circuits also tolerate a higher GIDL current,as compared to memory arrays, such that thinning gate oxides within theperipheral areas may be feasible from a GIDL standpoint.

In order to accommodate the differing needs of the memory array andperipheral circuits, the circuit design can include two or moredifferent thicknesses of gate oxide on the same silicon substrate.According to the prior art, different thicknesses of gate oxide havebeen formed by selective oxidation through an existing thin oxide layer(in areas which require thick oxides), or by selective etching of anexisting oxide layer (in areas which require thinner oxides). Eitherselective oxidation or etching, require at least one additional mask,which increases the cost of fabrication.

Moreover, thin gate oxides in field effect transistors are more easilyworn out due to the injection of hot electrical carriers through thechannel which is formed below the thin oxide. Such oxide wear out mayreduce reliability, yield and/or life span of the device.

Therefore, a need exists for processes and structures which address thevarious needs of memory arrays and logic circuits.

SUMMARY OF THE INVENTION

In accordance with one aspect of the invention, an integrated circuit isprovided. The circuit includes a semiconductor substrate with adjacentfirst and second areas, and first and second transistors gate electrodesare formed over the first and second areas, respectively. A first gatedielectric, including a non-oxide material, is positioned between thefirst transistor gate electrode and the substrate in the first area. Asecond gate dielectric is positioned between the second transistor gateelectrode and the substrate in the second area. Where x represents theequivalent oxide thickness of the first gate dielectric, the second gatedielectric has an equivalent oxide thickness of at least about 1.1x.

In accordance with another aspect of the invention, a system is providedwith a semiconductor substrate, including first and second transistors.Each of the first transistors has a first gate insulator, includingsilicon nitride, and each of the second transistors has a second gateinsulator formed of silicon oxide.

In accordance with another aspect of the invention, an integrated memorychip is provided. The chip includes logic circuits and memory arraycircuits on a semiconductor substrate. Transistor gate dielectrics inthe logic circuits include a layer of a first material, while transistorgate dielectrics in the memory array circuits are formed of a secondmaterial. The dielectric constant of the first material is differentfrom the dielectric constant of the first material.

In accordance with still another aspect of the invention, a memory chipis provided with at least one memory array and a logic circuit. Thememory array has array gate electrodes separated from a semiconductorsubstrate by a gate oxide. The logic circuit has logic gate electrodesseparated from the substrate by an gate dielectric, which includessilicon nitride and silicon oxide. The equivalent oxide thickness of thegate oxide is greater than the equivalent oxide thickness of the gatedielectric.

In accordance with another aspect of the invention, a process isdisclosed for optimizing gate insulator characteristics in differentregions of an integrated circuit formed in a semiconductor substrate.The process includes forming a non-oxide dielectric layer over a firstregion of the substrate. An oxide layer is grown through the non-oxidedielectric layer in the first region of the substrate. Simultaneously,an oxide layer is grown in an exposed second region of the substrate,which is situated adjacent the first region.

In accordance with yet another aspect of the invention, a method isdisclosed for fabricating a memory chip. Logic circuit and memory arrayregions are defined in a substrate. A silicon nitride layer is depositedover the substrate in both regions. A mask is formed over the siliconnitride layer in the logic circuit region, and a portion of the siliconnitride layer removed from the substrate in the memory array region.Then the mask is removed, followed by an oxidation.

BRIEF DESCRIPTION OF THE DRAWINGS

These and other aspects of the invention will be apparent from thefollowing description and from the appended drawings, wherein likenumerals refer to like parts and wherein:

FIG. 1 is a partial cross-sectional view of a semiconductor substrate,including both memory array and peripheral regions, with deviceisolation elements formed on the top surface of the substrate;

FIG. 2 is a view of the substrate of FIG. 1 after a thin oxide layer hasbeen grown over the substrate;

FIG. 3 shows the result of depositing a thin nitride layer over thestructure of FIG. 2;

FIG. 4 shows the structure of FIG. 3 after forming a photolithographicmask over peripheral area;

FIG. 5 shows the substrate of FIG. 4 after the nitride layer has beenremoved from a memory array area;

FIG. 6 shows the structure of FIG. 5 after removing the oxide layer fromthe memory array area;

FIG. 7 illustrates impurities being implanted in the memory array ofFIG. 6;

FIG. 8 shows the structure of FIG. 7 upon removal of the resist mask;and

FIG. 9 shows the structure of FIG. 8 after a second oxidation.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

The preferred embodiment of the present invention is directed to forminggate dielectrics in the context of dynamic random access memory (DRAM)integrated circuits. It will be recognized by one of skill in the art ofsemiconductor fabrication, however, that the invention will haveapplications for other circuits where gate dielectrics of differentcharacteristics are desired in different regions of the same substrate.

Referring initially to FIG. 1, a partially fabricated integrated circuitor workpiece 10 includes a substrate 12 and a plurality of shallowtrench isolation elements or moats 14 formed in the surface of thesubstrate 12. It will be understood, of course, that in otherarrangements field isolation can be accomplished by any of a number ofvariations on local oxidation of silicon (LOCOS), such as recessed,semi-recessed, etc., or by any other suitable process. Shallow trenchisolation, however, is preferred for high density, sub-quarter-micronapplications. Transistor active areas 16 are defined between isolationelements 14 in the substrate, such that the elements 14 ultimatelyisolate circuit devices formed from the active areas 16.

While the illustrated substrate 12 comprises the upper portion of asingle-crystal silicon wafer, the substrate in general represents thelowest layer of semiconductor material in the integrated circuit inwhich active areas of devices will be formed. In other arrangements, forexample, epitaxial layers of semiconductor material can be formed oversilicon, glass, or other supporting structures.

In accordance with state of the art memory chip fabrication, multiplechips are typically formed simultaneously on a single wafer or workpiece10. As will be understood by the skilled artisan, each chip includes aplurality of memory arrays and peripheral logic circuits for controllingread/write operations to the memory arrays. For description purposes, animaginary line 18 is shown dividing the substrate 12 into a memory arrayarea 20, shown on the right side of FIG. 1, and a peripheral area 22,shown on the left side of FIG. 1. In the memory array area 20,transistors will be formed and latched to capacitors to form memorycells for storing data bits, and the cells are interconnected by wordand bit lines. On the other hand, logic circuits will be formed in theperipheral area 22 to control reading and writing to the memory cells.The process of the present invention is performed at the initialfabrication stages of the memory device.

Although not illustrated, a sacrificial oxide layer is preferably grownon the top surface of the substrate 12 and stripped off prior to theprocess illustrated herein. This sacrificial growth and stripping isknown to clean out the surface of the active area 16 of the substrate12, on which various circuits will be formed. It will be appreciatedthat the growth and removal of such sacrificial oxide is known in theart and can be integrated in a variety of ways.

With reference to FIG. 2, a first silicon oxide layer or film 24 isformed on the surface of the active areas 16 in both the array andperipheral areas 20, 22. As will be apparent from the remainder of theprocess and the final gate dielectric structures, formation of the thinoxide film 24 at this stage is preferred but optional. The thickness ofthe first oxide film 24 is preferably between about 0 Å and 25 Å, morepreferably between about 13 Å and 18 Å, and most preferably about 15 Å.While thinner layers may be desirable for faster switching times,formation of thermal oxides of less than 10 Å is generally difficult torepeat with consistency from wafer to wafer with current processingtechnology, though thinner may dielectrics may be feasible for futuregenerations. The thin oxide layer 24 is preferably grown by thermaloxidation, and most preferably by rapid thermal oxidation (RTO). Thoseof skill in the art of semiconductor processing can readily determinesuitable parameters for thermal oxidation in general, and RTO inparticular. It will also be appreciated that deposition techniques suchas chemical vapor deposition can be employed for forming high qualitysilicon oxide films.

Referring to FIG. 3, a thin silicon nitride (Si₃N₄) film or layer 26 isformed over the oxide layer 24. The nitride layer 26 is preferablydeposited to a thickness from about 5 Å to about 35 Å, more preferablybetween about 15 Å and 25 Å, and most preferably about 20 Å. The siliconnitride film 26 is preferably deposited by a chemical vapor deposition(CVD) process, in which a silicon source gas such as silane (SiH₄) isreacted at the surface of the substrate 12 with a nitrogen source gassuch as ammonia (NH₃). CVD of silicon nitride is well-understood in theart of integrated circuit fabrication. Most preferably, rapid thermalprocessing technology is employed for time and cost efficiency. RTCVD isalso well-known in the art.

Advantageously, the preferred material (silicon nitride) for thisnon-oxide dielectric is a harder material than silicon oxide, andtherefore more resistant to wear out from hot carrier injection.Additionally, the preferred material can be selectively etched relativeto silicon oxide, entailing processing advantages, as will be apparentfrom the disclosure below.

With reference to FIG. 4, a mask 28 is then formed to isolate theperipheral area 22. In the illustrated embodiment, the mask 28 is formedby conventional photolithographic techniques. Typically, organicphotoresist is formed over the substrate 12 and selectively exposed todeveloping light. Developed or undeveloped portions are then selectivelyremoved, depending upon whether a positive or negative photoresist isemployed. As a result of this selective removal, the mask 28 is leftcovering the peripheral area 22, as shown in FIG. 4. In conventionalprocessing, such a mask 28 is employed at this stage of processing toimplant impurities into all active areas 16 of the substrate 12 of thememory array areas 20. This implantation step, which effectively setsthe threshold voltage for transistors in the memory array, is referredto in the art as a blanket V_(t) implant. For example, There thebackground doping of the substrate 12 is n-type, the V_(t) implant is ofp-type impurities, leaving an n-type channel.

In the illustrated embodiment, the same mask 28 further serves toprotect the dielectric layers 24, 26 in the periphery 22, while the samelayers are removed from the memory array areas of substrate 12, as willbe described presently. Advantageously, the present process for formingdual gate dielectrics utilizes an existing mask from the conventionalprocess and therefore requires no extra masks. Moreover, the maskdefines openings over memory arrays, which represent a large block ofmemory cells having a specific density. As such, alignment of this maskis not critical, as compared to the much finer features defined by othermasks in integrated circuit processing.

With reference to FIG. 5, the nitride layer 26 is then removed from thememory array area 20. Preferably, the nitride is etched selectivelyrelative to the underlying oxide 24. In addition to selectivity over theunderlying material, the etch process should avoid excessive damage tothe photoresist mask 28, which protects the nitride layer 26 over theperiphery 22. Because the features at issue are large (e.g., array areasare greater than 50 μm and generally several hundred microns across),minor damage to the mask is tolerable. In the illustrated embodiment, awet chemical etch is preferably performed at relatively lowtemperatures, to avoid damaging the photoresist mask 28. The wafer 10 isimmersed into a phosphoric acid etch bath, for example, until thenitride layer 26 is removed. Photoresist can typically withstandtemperatures of up to 70° C. for a few minutes. The temperature of theetch bath, however, is preferably kept below about 50° C., morepreferably under about 35° C. In the illustrated embodiment, thetemperature of the etch bath is kept at about 30° C., such that thepreferred nitride layer of about 20 Å is removed in 5 minutes. Theskilled artisan will appreciate that other etch chemistries andparameters can accomplish the same objectives.

If the previous oxide growth has not been performed, then the nitride 26would be removed selectively against the underlying substrate 12. Suchan option is less preferred due to the relatively more difficultselective etch of nitride from over silicon, particularly whereselective dry etch is to be employed. Moreover, if the substrate isdirectly exposed wet phosphoric acid etching of silicon nitride, with nointervening silicon oxide, the dopant profile of transistor active areascan be affected by the phosphor in the wet etch.

Following the removal of the nitride layer 26, the optional oxide layer24 of the preferred embodiment is exposed in the memory array area 20,as illustrated in FIG. 6. As with the removal of the nitride film 26,the oxide layer 24 is preferably removed by a wet chemical etch in whichthe photoresist mask 28 continues to protect the underlying layer 26 andoxide film 24 in the periphery 22. For example, the wafer 10 can bedipped into a hydrofluoric acid (HF) bath at less than about 35° C.,more preferably less than about 30° C. (about 27° C. in the preferredembodiment) until the oxide film 24 is removed. The HF dip selectivelyremoves oxide relative to the underlying silicon, while low temperaturesprevent damage to the photoresist 28. As will be understood, thisetching can also be substituted with other suitable selective etchchemistries. While not required in view of the subsequent oxidere-growth (see FIG. 6 and accompanying text), the oxide removal ispreferred due to damage to this layer likely to be caused by the siliconnitride etch. Moreover, the oxide etch can be employed even when theoptional oxide layer 24 is omitted, as native oxide and minor damagefrom the V_(t) implant can be cleaned up.

As illustrated in FIG. 7, the blanket V_(t) implant can be performed atthis stage, after the removal of the nitride layer 26 and/or oxide layer24 from over the memory array. It will be understood, however, that thisimplant can be equally well performed through the oxide and/or nitridelayers prior to their removal.

Referring now to FIG. 8, the photoresist mask 28 is removed byconventional stripping processes after the selective etches. Forexample, the resist can be burned off in an ozone process and the waferrinsed with deionized water.

Referring to FIG. 9, following the resist strip, both the periphery 22and the memory array area 20 are subjected to thermal oxidation, such asrapid thermal oxidation (RTO) or batch furnace oxidation. The oxidegrows differentially in the memory array area 20 and the periphery 22.In the peripheral region 22, oxygen diffuses slowly through the nitridelayer 26 to slightly thicken the underlying oxide 24 by about 5 Å. Atthe same time, a very thin second oxide film 30 grows over the nitridelayer 26, typically less than about 5 Å, for example about 2 Å to 3 Å.The second oxide film 30 grows from excess silicon within the siliconnitride layer 26, as well as any silicon which diffuses upwardly throughthe first oxide layer 24 and the nitride layer 26. Oxide growth in bothlayers 24 and 30 during the second oxidation, of course, depends uponthe thickness of the nitride layer 26 through which oxygen diffuses.Thus, growth in the underlying layer 24 can range between about 5 Å and10 Å for the preferred ranges of thickness of the nitride layer 26,while the overlying oxide layer 30 can range in thickness between about5 Å and 10 Å.

On the other hand, an oxide 32 grows comparatively quickly on the nakedsilicon substrate 12 in the active area 16 of the memory array 20. Forpresent generation DRAM circuit design, with a minimum feature size ofabout 0.20 μm or lower, the oxygen layer 32, which represents the fullgate dielectric in the array area 20, is preferably grown to a thicknessto about 60 Å to 80 Å, and more preferably between about 70 Å and 80 Å.It will be understood, however, that optimal gate dielectric thicknessfor the memory array depends upon a variety of factors determined by thecircuit design, such that the actual thickness can vary for differentcircuit designs. For example, in integrated circuits employing 0.15 μmtechnology (0.13 μm, 0.10 μm etc.), all features may be sealed down.

In the illustrated embodiment, a peripheral gate dielectric 34 thuscomprises an oxide-nitride-oxide (ONO) structure, with the mostpreferred dimensions being about 20 Å of silicon oxide 24 immediatelyadjacent the substrate 12; 20 Å of silicon nitride 26 thereover; andabout 2 Å to 3 Å of silicon oxide 30 over the nitride 26. This actualONO thickness of about 42 to 43 Å translates to an equivalent oxidethickness of about 50 Å, as will be understood in the art. An equivalentoxide thickness is defined as the thickness of pure silicon oxide whichwould have the same insulating or capacitive effect as the ONO structure(or other non-oxide dielectric). In general, the equivalent oxidethickness of the peripheral gate dielectric 34, regardless of itsprecise construction, is preferably less than about 60 Å, and morepreferably less than about 50 Å.

The equivalent oxide thickness of the ONO layer 34 represents abouttwo-thirds of the oxide thickness of the memory array gate dielectric32. This ratio can vary slightly in accordance with the above-discussedvariability of the various steps in the process.

In general, however, the peripheral gate dielectric 34 has a smallerequivalent oxide thickness than the array gate dielectric 32, such thatthe logic circuits in the peripheral region 22 can operate with fasterswitching speeds than the transistors within the array region 20. If theperipheral gate dielectric 34 is assigned an equivalent oxide thicknessof x, the array dielectric 32 has an equivalent oxide thickness greaterthan x, preferably between about 1.1x and 4x, more preferably betweenabout 1.3x and 1.7x, and most preferably about 1.5x. In futuregenerations of integrated circuits, these ratios will change, as will beunderstood by the skilled artisan, due to differing needs of circuits indifferent generations.

Moreover, despite the thinner overall gate dielectric 34 in theperipheral region 22, the presence of the nitride layer 26 within theperipheral gate dielectric 32 means that the peripheral gate dielectric34 represents a harder material than the gate dielectric 32 in thememory array area 20. The harder nitride resists hot carrier injection,and therefore does not wear out as easily as an equivalent pure oxideinsulator would. Thus, the peripheral circuits can operate at fasterswitching speeds, as is desirable for logic circuits in the peripheralarea 22, while exhibiting the durability of a thicker oxide layer. Atthe same time, GIDL-sensitive circuits in the memory array can be grownmore thickly (e.g. 70 Å to 80 Å), reducing or obviating the need fortraditional remedies for GIDL, such as gate corner re-oxidation.

The integrated circuit can thereafter be completed by conventionalfabrication processes, including deposition of gate and strapping wordline layers followed by photolithographic definition of the gates andcompletion of the transistors. Significantly, polysilicon gates can bestrapped with metals susceptible to oxidation. Preferably, dopedpolysilicon is strapped with tungsten to enhance word line propagationspeeds. Desirably, re-oxidation at the gate edges is omitted due tosufficient gate dielectric thickness in the memory array area 20.

As will be understood from the foregoing process, the first oxide 24 canbe omitted. A thin oxide layer would still grow under the siliconnitride during the oxidation following nitride deposition, for exampleabout 5 Å to 10 Å thick. The initial oxidation is preferred, however, inorder to protect the substrate 12 in the active areas 16 of the array 20during etching of the silicon nitride 26 in this region (see FIG. 5 andaccompanying text). Etching oxide selectively against an underlyingsilicon is generally less harmful to the underlying substrate thanselectively etching silicon nitride from over a silicon substrate.

Accordingly, the processes and structures described here enableoptimizing the construction of gate dielectrics in different regions ofan integrated circuit. In particular, the dielectric can be made thinnerfor circuits requiring fast or aggressive operation, while the gatedielectric in leakage-sensitive circuits can be made thicker. At thesame time, the thinner dielectric can be made harder to resist wear indemanding operational conditions. While the preferred material comprisessilicon nitride, the skilled artisan will recognize other suitabledielectric materials for this purpose.

Moreover, the invention entails many process advantages. For example,the illustrated materials (silicon oxide and nitride) can be selectivelyetched, relative to one another, facilitating high quality dielectriclayers with relatively simple integration. Due to hardness of the gatedielectrics in the logic circuits, potentially harmful remedialprocesses, such as gate corner re-oxidation, can be reduced or evenomitted, facilitating integration of tungsten or other metalssusceptible to oxidation. In addition, the disclosed process requires noadditional mask as compared to conventional processes for unitary gatedielectrics, while the disclosed process still provides dual gatedielectrics for different circuits on the same chip. As is well known inthe art, saving an additional mask step (by utilizing a mask existing inthe conventional process flow) represents considerable cost savings infabrication.

Although the present invention has been described in the context ofcertain preferred embodiments, it will be understood by the skilledartisan that various omissions, substitutions and changes may be made tothe disclosed process without departing from the spirit of the presentinvention. Consequently, the scope of the present invention is not meantto be limited to the preferred embodiment, but is rather defined byreference to the appended claims.

1. An integrated circuit, comprising: a semiconductor substrate having afirst area and a second area, where the second area is adjacent to thefirst area; a first transistor gate electrode formed over the substratein the first area; a second transistor gate electrode formed over thesubstrate in the second area; a first gate dielectric layer disposedbetween the first transistor gate electrode and the substrate, where thefirst gate dielectric layer includes a layer of silicon nitride that issufficiently thin to permit the oxidation of underlying silicontherethrough; and a second gate dielectric layer disposed between thesecond transistor gate electrode and the substrate, the second gatedielectric layer having a thickness that is different than theequivalent thickness of the first gate dielectric layer.
 2. Theintegrated circuit of claim 1, wherein the second gate dielectric layercomprises silicon oxide.
 3. The integrated circuit of claim 1, whereinthe second gate dielectric layer has a thickness that is greater thanthe equivalent thickness of the first gate dielectric layer.
 4. Theintegrated circuit of claim 1, wherein the first gate dielectric layerfurther comprises a silicon oxide layer disposed between the siliconnitride layer and the substrate in the first area.
 5. The integratedcircuit of claim 4, wherein the first gate dielectric layer furthercomprises an oxide layer disposed over the silicon nitride layer.
 6. Theintegrated circuit of claim 1, wherein a plurality of memory arrays areformed in the second area of the substrate.
 7. The integrated circuit ofclaim 6, wherein a logic control circuit is formed in the first area ofthe substrate.
 8. The integrated circuit of claim 7, wherein the firstarea is formed at the periphery of the second area.